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Surface Science Lab

Scanning Field Emission Microscope (SFEM)

  • Large scanning size d=25mm
  • Spatial resolution 2.5 mm
  • Routine operation electric field up to 140 MV/m
  • In-situ heat treatment chamber
  • Coupled with SEM and EDX

Scanning Electron Microscope (SEM) and Energy Dispersive X-ray Analysis (EDX)

  • Morphology and Topography (Surface and Cross-section)
  • Magnification can be up to 100,000 routinely (a few nanometer resolution)
  • Can detect all elements with mass heavier than Boron
  • Probe depth ~ 1-5 micrometer
  • Detection limit ~ 0.5% atm weight
  • Can be extended to include the measurement of secondary electron yield

Secondary Ion Mass Spectrometry (SIMS)

  • Surface composition analysis (ppm or ppb)
  • Can detect all elements and their isotopes including hydrogen
  • Depth profile