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Surface Science Lab

Scanning Field Emission Microscope (SFEM)

Large scanning size d=25mm
Spatial resolution 2.5 mm
Routine operation electric field up to 140 MV/m
In-situ heat treatment chamber
Coupled with SEM and EDX

Scanning Electron Microscope (SEM) and Energy Dispersive X-ray Analysis (EDX)

Morphology and Topography (Surface and Cross-section)
Magnification can be up to 100,000 routinely (a few nanometer resolution)
Can detect all elements with mass heavier than Boron
Probe depth ~ 1-5 micrometer
Detection limit ~ 0.5% atm weight
Can be extended to include the measurement of secondary electron yield

Secondary Ion Mass Spectrometry (SIMS)

Surface composition analysis (ppm or ppb)
Can detect all elements and their isotopes including hydrogen
Depth profile